| 摘要 |
A mask plate and a manufacturing method therefor. The mask plate comprises a body, and comprises a film layer (02) that covers the surface of the body (01) and comprises a oleophobic material. In this manner, the possibility that an organic coagulation (04) is adhered to a surface of the mask plate can be effectively reduced, and the pollution of an organic volatile substance such as an organic solvent in a photoresist to the mask plate in an exposure process is reduced. |
