| 摘要 |
<p>The present invention relates to a charged particle beam device provided with a charged particle source, a charged particle optical system, a detector, a sample stage, a sample chamber, and a control unit controlling an image display device. In addition to a sample image, the control unit displays on a display unit: a message requesting that the operator verify whether the sample image is suffering from image distortion, irregular brightness, lack of depth, or image blur; a first button for the operator to press when the sample image is suffering from image distortion, irregular brightness, or lack of depth; and a second button for the operator to press when the sample screen is suffering from image blur. When the first button or the second button is pressed, the control unit displays on the display unit a message describing the cause therefor, according to the observation conditions. The present invention allows even novices to easily recognize whether imaging results are acceptable and understand the causes and remedies therefor, thereby improving skill in operating the charged particle device, and as a result, improving image quality.</p> |
