IMAGE DETECTION DEVICE, CHARGED PARTICLE BEAM DEVICE, AND SAMPLE OBSERVATION METHOD

摘要

The present invention generates charged particle spiral waves. An image detection device wherein: magnetic fields are applied in a direction parallel to the optical axis of a charged particle beam device in a manner such that the image detection device is immersed; and an image detector is disposed on an extension line of the axis or the axial direction of the application of the magnetic fields in a manner such that a charged particle beam and the magnetic flux lines of the applied magnetic fields interact asymmetrically. The charged particle beam that is incident on the image detector is configured to be a charged particle spiral wave by controlling the generated amount of magnetic flux and the polarity thereof such that the amount of magnetic flux that interacts with the charged particle beam satisfies a condition suitable for generating spiral waves.