FLUID DEPOSITION APPARTUS AND METHOD

摘要

The present disclosure relates to a micro-fluidic probe card that deposits a fluidic chemical onto a substrate with a minimal amount of fluidic chemical waste, and an associated method of operation. In some embodiments, the micro-fluidic probe card has a probe card body with a first side and a second side. A sealant element, which contacts a substrate, is connected to the second side of the probe card body in a manner that forms a cavity within an interior of the sealant element. A fluid inlet, which provides a fluid from a processing tool to the cavity, is a first conduit extending between the first side and the second side of the probe card body. A fluid outlet, which removes the fluid from the cavity, is a second conduit extending between the first side and the second side of the probe card body.

主权项

1. A micro-fluidic probe card, comprising:
a probe card body having a first side and a second side; a sealant element connected to the second side of the probe card body in a manner that forms a cavity within a hollow interior of the sealant element; a fluid inlet comprising a first conduit extending between the first side and the second side, wherein the fluid inlet is configured to provide a fluid from a processing tool to the cavity; and a fluid outlet comprising a second conduit extending between the first side and the second side, wherein the fluid outlet is configured to remove the fluid from the cavity.