发明名称 |
INFORMATION ACQUIRING APPARATUS AND INFORMATION ACQUIRING METHOD FOR ACQUIRING INFORMATION ON SPECIMEN BY USING TERAHERTZ WAVE |
摘要 |
An information acquiring apparatus that acquires information on a specimen by applying terahertz wave to the specimen through a plate-like member, the specimen being provided between a reflecting member having a reflecting surface and the plate-like member. The apparatus includes an applying unit that applies the terahertz wave to the specimen, a detecting unit that detects the terahertz wave reflected from the specimen, and an information acquiring unit that acquires the information on the specimen by using temporal waveforms acquired from a result of detection performed by the detecting unit, the information acquiring unit using at least a temporal waveform representing a portion of the terahertz wave that is reflected by an interface between the plate-like member and the specimen and a temporal waveform representing a portion of the terahertz wave that is reflected by an interface between the specimen and the reflecting surface of the reflecting member. |
申请公布号 |
US2015076354(A1) |
申请公布日期 |
2015.03.19 |
申请号 |
US201414485453 |
申请日期 |
2014.09.12 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Koizumi Takayuki |
分类号 |
G01N21/55;G01N33/48;G01N33/44;G21K5/02;G01J1/04 |
主分类号 |
G01N21/55 |
代理机构 |
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代理人 |
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主权项 |
1. An information acquiring apparatus that acquires information on a specimen by applying terahertz wave to the specimen through a plate-like member, the specimen being provided between a reflecting member and the plate-like member, the reflecting member having a reflecting surface that reflects the terahertz wave, the apparatus comprising:
an applying unit that applies the terahertz wave to the specimen; a detecting unit that detects the terahertz wave reflected from the specimen; and an information acquiring unit that acquires the information on the specimen from a result of detection performed by the detecting unit, the information acquiring unit using at least a temporal waveform representing a portion of the terahertz wave that is reflected by an interface between the plate-like member and the specimen and a temporal waveform representing a portion of the terahertz wave that is reflected by an interface between the specimen and the reflecting surface of the reflecting member. |
地址 |
Tokyo JP |