发明名称 INFORMATION ACQUIRING APPARATUS AND INFORMATION ACQUIRING METHOD FOR ACQUIRING INFORMATION ON SPECIMEN BY USING TERAHERTZ WAVE
摘要 An information acquiring apparatus that acquires information on a specimen by applying terahertz wave to the specimen through a plate-like member, the specimen being provided between a reflecting member having a reflecting surface and the plate-like member. The apparatus includes an applying unit that applies the terahertz wave to the specimen, a detecting unit that detects the terahertz wave reflected from the specimen, and an information acquiring unit that acquires the information on the specimen by using temporal waveforms acquired from a result of detection performed by the detecting unit, the information acquiring unit using at least a temporal waveform representing a portion of the terahertz wave that is reflected by an interface between the plate-like member and the specimen and a temporal waveform representing a portion of the terahertz wave that is reflected by an interface between the specimen and the reflecting surface of the reflecting member.
申请公布号 US2015076354(A1) 申请公布日期 2015.03.19
申请号 US201414485453 申请日期 2014.09.12
申请人 CANON KABUSHIKI KAISHA 发明人 Koizumi Takayuki
分类号 G01N21/55;G01N33/48;G01N33/44;G21K5/02;G01J1/04 主分类号 G01N21/55
代理机构 代理人
主权项 1. An information acquiring apparatus that acquires information on a specimen by applying terahertz wave to the specimen through a plate-like member, the specimen being provided between a reflecting member and the plate-like member, the reflecting member having a reflecting surface that reflects the terahertz wave, the apparatus comprising: an applying unit that applies the terahertz wave to the specimen; a detecting unit that detects the terahertz wave reflected from the specimen; and an information acquiring unit that acquires the information on the specimen from a result of detection performed by the detecting unit, the information acquiring unit using at least a temporal waveform representing a portion of the terahertz wave that is reflected by an interface between the plate-like member and the specimen and a temporal waveform representing a portion of the terahertz wave that is reflected by an interface between the specimen and the reflecting surface of the reflecting member.
地址 Tokyo JP