发明名称 LITHOGRAPHY SYSTEM USING OLED PANEL
摘要 The present invention relates to a lithography system using an OLED panel and, more particularly, to a lithography system using an OLED panel, which easily achieves a large area when fabricating a three-dimensional shape, provides a reduction in manufacturing costs and processes by simplifying the kinds of required equipment, and facilitates mass production.
申请公布号 WO2015037901(A1) 申请公布日期 2015.03.19
申请号 WO2014KR08444 申请日期 2014.09.10
申请人 LEE, SOOIN;CHOI, JAEHOON;HA, DONGHEON 发明人 LEE, SOOIN;CHOI, JAEHOON;HA, DONGHEON
分类号 H01L51/56;G03F7/26 主分类号 H01L51/56
代理机构 代理人
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