发明名称 |
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide a transistor using an oxide semiconductor film; or provide a transistor using an oxide semiconductor film where oxygen deficiency is reduced; or provide a transistor having excellent electric characteristics.SOLUTION: A semiconductor device comprises a first insulation film, a first oxide semiconductor film, a gate insulation film and a gate electrode. The first insulation film has a first region and a second region. The first region is a region hard to transmit oxygen compared with the second region and the first oxide semiconductor film is arranged at least on the second region. |
申请公布号 |
JP2015053478(A) |
申请公布日期 |
2015.03.19 |
申请号 |
JP20140157316 |
申请日期 |
2014.08.01 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
ENDO YUTA;NODA KOSEI;SATO YUICHI |
分类号 |
H01L21/336;H01L29/786 |
主分类号 |
H01L21/336 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|