发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a transistor using an oxide semiconductor film; or provide a transistor using an oxide semiconductor film where oxygen deficiency is reduced; or provide a transistor having excellent electric characteristics.SOLUTION: A semiconductor device comprises a first insulation film, a first oxide semiconductor film, a gate insulation film and a gate electrode. The first insulation film has a first region and a second region. The first region is a region hard to transmit oxygen compared with the second region and the first oxide semiconductor film is arranged at least on the second region.
申请公布号 JP2015053478(A) 申请公布日期 2015.03.19
申请号 JP20140157316 申请日期 2014.08.01
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 ENDO YUTA;NODA KOSEI;SATO YUICHI
分类号 H01L21/336;H01L29/786 主分类号 H01L21/336
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