发明名称 CUTTING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a cutting device provided with a nozzle which can prevent convection of a processing liquid on a workpiece.SOLUTION: In a cutting device (2), which comprises a chuck table (10) that holds a workpiece (11) by a holding surface (10a), and cutting means (12) that cuts the workpiece by a cutting blade (34) fitted at the tip of a spindle while supplying a processing liquid (W2) to the workpiece held at the chuck table, the processing liquid is supplied from processing liquid supply means (36), and the processing liquid supply means is constituted of a band-like flow forming nozzle including a slit-like exhaust port (36c) which flows the processing liquid to form a band-like shape from the front side of the proceeding direction to the rear side of the proceeding direction of the processing in the vicinity of a processing point (P) at the upper surface of the workpiece.</p>
申请公布号 JP2015051484(A) 申请公布日期 2015.03.19
申请号 JP20130186113 申请日期 2013.09.09
申请人 DISCO ABRASIVE SYST LTD 发明人 GO TAKESHI;YAMADA SHIYOUJIRO
分类号 B24B27/06;B24B55/02;H01L21/301 主分类号 B24B27/06
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