AMINE TREATED MALEIC ANHYDRIDE POLYMERS WITH PENDENT SILYL GROUP, COMPOSITIONS AND APPLICATIONS THEREOF

摘要

Disclosed herein are various amine treated maleic anhydride containing polymers and compositions thereof, which are useful for forming self-imageable films. In some embodiments, such polymers encompass norbornene-type repeating units containing pendent silyl groups and maleic anhydride-type repeating units where at least some of such maleic anhydride-type repeating units are either ring-opened or have been transformed into maleimide repeat units. The films formed from such copolymer compositions provide self imageable, low-k, thermally stable layers for use in microelectronic and optoelectronic devices.

主权项

1. A polymer comprising:
a first type of repeating unit represented by formula (IA), said first type of repeating unit is derived from a monomer of formula (I): wherein: m is an integer 0, 1 or 2; at least one of R1, R2, R3 and R4 independently represents a group of formula (A):
—SiR5R6R7  (A)wherein:R5, R6, and R7 are the same or different and each independently of one another is selected from linear or branched (C1-C6)alkyl, (C5-C8)cycloalkyl, (C6-C10)aryl or (C7-C12)aralkyl; remaining one or more of R1, R2, R3 and R4 independently represents hydrogen, linear or branched (C1-C16)alkyl, hydroxy(C1-C16)alkyl, perfluoro(C1-C12)alkyl, (C3-C12)cycloalkyl, (C6-C12)bicycloalkyl, (C7-C14)tricycloalkyl, (C6-C10)aryl, (C6-C10)aryl(C1-C3)alkyl, perfluoro(C6-C10)aryl, perfluoro(C6-C10)aryl(C1-C3)alkyl, (C5-C10)heteroaryl, (C5-C10)heteroaryl(C1-C8)alkyl, hydroxy, (C1-C12)alkoxy, (C3-C12)cycloalkoxy, (C6-C12)bicycloalkoxy, (C7-C14)tricycloalkoxy, (C6-C10)aryloxy(C1-C3)alkyl, (C5-C10)heteroaryloxy(C1-C3)alkyl, (C6-C10)aryloxy, (C5-C10)heteroaryloxy, (C1-C6)acyloxy, halogen, di(C1-C2)alkylmaleimide(C3-C6)alkyl, di(C1-C2)alkylmaleimide(C2-C6)alkoxy(C1-C2)alkyl, oxiranyl(C0-C8)alkyl, oxiranyl(CH2)aO(CH2)b—, or a group of formula (B):
—(CH2)a—(OCH2—CH2)b—OR  (B)wherein:a is an integer 0, 1, 2, 3 or 4;b is an integer 0, 1, 2, 3 or 4; andR is linear or branched (C1-C6)alkyl, (C5-C8)cycloalkyl, (C6-C10)aryl or (C7-C12)aralkyl; optionally a second type of repeating unit represented by formula (IIA), said second type of repeating unit is derived from a monomer of formula (II):wherein
R8, R9, R10 and R11 are the same or different and each independently of one another is selected from hydrogen, linear or branched (C1-C6)alkyl, (C5-C8)cycloalkyl, (C6-C10)aryl or (C7-C12)aralkyl or a group of formula (C):
—SiR5R6R7  (C)wherein:R5, R6, and R7 are the same or different and each independently of one other is selected from linear or branched (C1-C6)alkyl, (C5-C8)cycloalkyl, (C6-C10)aryl or (C7-C12)aralkyl; or one of R8 or R9 taken together with one of R10 or R11 and the carbon atoms to which they are attached form a (C5-C8)cycloalkyl ring; and a third type of repeating unit represented by formula (IIIC), said third type of repeating unit is derived from a monomer of formula (III): wherein: R12 and R13 are each independently of one another represents hydrogen or linear or branched (C1-C9)alkyl or fluorinated or perfluorinated (C1-C9)alkyl; andwherein each of aforementioned groups, where valence is permissible, is optionally substituted with one or more groups selected from linear or branched (C1-C6)alkyl, (C3-C7)cycloalkyl, (C1-C6)perfluoroalkyl, (C1-C6)alkoxy, (C3-C7)cycloalkoxy, (C1-C6)perfluoroalkoxy, halogen, hydroxy, linear or branched hydroxy(C1-C6)alkyl, (C6-C10)aryl or (C7-C12)aralkyl; andwherein each of aforementioned groups, where valence is permissible, is optionally substituted with one or more groups selected from linear or branched (C1-C6)alkyl, (C3-C7)cycloalkyl, (C1-C6)perfluoroalkyl, (C1-C6)alkoxy, (C3-C7)cycloalkoxy, (C1-C6)perfluoroalkoxy, halogen, hydroxy, linear or branched hydroxy(C1-C6)alkyl, (C6-C10)aryl or (C7-C12)aralkyl.