| 发明名称 |
METHOD FOR PRODUCING METAL OXIDE FILM AND METAL OXIDE FILM |
| 摘要 |
In the method for producing a metal oxide film according to the present invention, a solution containing an alkyl metal is sprayed onto a substrate placed under non-vacuum. Further, when the solution is sprayed, a dopant solution containing a dopant including an inorganic compound is sprayed onto the substrate. |
| 申请公布号 |
US2015076422(A1) |
申请公布日期 |
2015.03.19 |
| 申请号 |
US201214382827 |
申请日期 |
2012.03.28 |
| 申请人 |
Shirahata Takahiro;Orita Hiroyuki;Hiramatsu Takahiro |
发明人 |
Shirahata Takahiro;Orita Hiroyuki;Hiramatsu Takahiro |
| 分类号 |
C23C18/12;H01B1/08 |
主分类号 |
C23C18/12 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for producing metal oxide film, comprising:
(A) spraying a solution comprising an alkyl metal onto a substrate placed under non-vacuum; and (B) spraying a dopant solution comprising a dopant comprising an inorganic compound onto the substrate in the spraying (A). |
| 地址 |
Tokyo JP |
