发明名称 |
OPTICAL WAVEGUIDE ELEMENT |
摘要 |
An object of the present invention is to provide an optical waveguide element that effectively diffuses charges accumulated in a substrate, and suppress DC drift or temperature drift. The optical waveguide element includes a substrate having an electro-optical effect, optical waveguides formed in the substrate, a buffer layer (BF layer) formed on the substrate, and modulation electrodes (signal electrode and ground electrode) that are formed on the buffer layer and modulate optical waves propagating through the optical waveguides, a charge diffusion layer that diffuses charges generated in the substrate is formed between the substrate and the buffer layer, and the charge diffusion layer is electrically connected with a ground electrode constituting the modulation electrode. |
申请公布号 |
US2015078701(A1) |
申请公布日期 |
2015.03.19 |
申请号 |
US201314389416 |
申请日期 |
2013.03.29 |
申请人 |
SUMITOMO OSAKA CEMENT CO., LTD. |
发明人 |
Takemura Motohiro;Kurihara Masanao;Fujino Tetsuya |
分类号 |
G02F1/035 |
主分类号 |
G02F1/035 |
代理机构 |
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代理人 |
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主权项 |
1. An optical waveguide element comprising:
a substrate having an electro-optical effect; optical waveguides formed in the substrate; a buffer layer formed on the substrate; and modulation electrodes that are formed on the buffer layer and that modulate optical waves propagating through the optical waveguides, wherein a charge diffusion layer that diffuses charges generated in the substrate is formed between the substrate and the buffer layer, and the charge diffusion layer is electrically connected with a ground electrode constituting the modulation electrode. |
地址 |
CHIYODA-KU, TOKYO JP |