A membrane structure is provided. The membrane structure may include: a membrane; at least one hole extending into the membrane configured to receive a fluid. The membrane may include a plurality of electrodes arranged to provide one or more electric fields to control a movement of the fluid within the at least one hole.
申请公布号
WO2015036103(A1)
申请公布日期
2015.03.19
申请号
WO2014EP02393
申请日期
2014.09.04
申请人
INFINEON TECHNOLOGIES AG
发明人
FEHR, BERNHARD;HITZLBERGER, KARL HEINZ;MELZNER, HANN