CERAMIC PRESSURE SENSOR AND METHOD FOR PRODUCTION THEREOF

摘要

A method for production of a pressure sensor including a flat flexible membrane made of a ceramic material and a flat rigid support thereof made of a ceramic material is provided. Steps include: —establishing an electric circuit on the membrane; —establishing an electric contact with the outside on the support; —depositing an electrically conductive material on the support; —establishing an electrical and mechanical coupling between the membrane and the support. The electrical coupling between the membrane and the support are performed by deposition and sintering of at least one layer of an electrically conductive sinterable electrical connection material. The mechanical coupling between the membrane and the support are performed by deposition and sintering of at least one layer of sinterable mechanical connection material that is electrically insulating and/or isolated from the layer of sinterable electrical connection material. The layer of sinterable electrical connection material and the layer of sinterable mechanical connection material undergo re flow together in a single step in a sintering furnace.

主权项

1. A method for production of a pressure sensor comprising a flat flexible membrane made of a ceramic material and a flat rigid support thereof made of a ceramic material, comprising:
establishing an electric circuit on the membrane; establishing an electric contact with the outside on the support; depositing an electrically conductive material on the support; establishing an electrical and mechanical coupling between the membrane and the support; wherein the electrical coupling between the membrane and the support is performed by deposition and sintering of at least one layer of electrically conductive sinterable electrical connection material, wherein the mechanical coupling between the membrane and the support is performed by deposition and sintering of at least one layer of sinterable mechanical connection material that is electrically insulating and/or isolated from the layer of sinterable electrical connection material, and wherein the layer of sinterable electrical connection material and the layer of sinterable mechanical connection material undergoing reflow together in a single step in a sintering furnace.