发明名称 SHEET STICKING DEVICE, AND SHEET STICKING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a sheet sticking device in which an adhesive sheet is not separated from a holding member, and which is capable of preventing the adhesive sheet and an adherend from being lifted by the holding member.SOLUTION: A sheet sticking device 1 comprises: holding means 3 which has a deformable holding member 31 and holds an adhesive sheet AS by the holding member 31; pressing means 4 for deforming the holding member 31 and sticking the adhesive sheet AS to an adherend WF by pressing; and moving means 5 for relatively moving the adherend WF and the holding member 31 in a separable/approachable manner. The holding member 31 is deformed so as to swell toward the adherend WF and adhere the adhesive sheet AS onto the adherend WF, and the holding member 31 and the adherend WF are separated while the holding member 31 is kept deformed.</p>
申请公布号 JP2015053396(A) 申请公布日期 2015.03.19
申请号 JP20130185522 申请日期 2013.09.06
申请人 LINTEC CORP 发明人 MENJU TOSHIAKI
分类号 H01L21/683;H01L21/301 主分类号 H01L21/683
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