Piezoelectric Thin Film, Piezoelectric Element, Ink-Jet Head, And Ink-Jet Printer

摘要

A piezoelectric thin film which is of a perovskite type having a tetragonal crystal structure, the tetragonal crystal having a degree of (100) orientation of 80% or higher. The piezoelectric thin film is constituted of a lead lanthanum zirconate titanate (PLZT) which is a lead zirconate titanate (PZT) in which some of the lead has been replaced with lanthanum.

主权项

1. A piezoelectric thin film of a perovskite type comprising a crystal structure of a tetragonal crystal,
wherein a (100) orientation degree of the tetragonal crystal is 80% or higher, and the piezoelectric thin film is made of PLZT obtained by substituting La for a part of Pb in PZT.