THIN FILM TRANSISTOR ARRAY SUBSTRATE

摘要

A pixel electrode of an array substrate is connected with a drain electrode of a TFT via a first aperture formed on a second interlayer insulating film, a second aperture that includes a bottom portion of the first aperture and is formed on a common electrode, a third aperture that includes at least a part of the bottom portion of the first aperture, is included in a second aperture and is formed on a third interlayer insulating film, and a fourth aperture that is formed on the first interlayer insulating film in a region where the third aperture overlaps with the bottom portion of the first aperture.

主权项

1. A thin film transistor array substrate comprising:
a thin film transistor formed on a substrate; a common wiring formed on said substrate; a first interlayer insulating film formed on said thin film transistor and said common wiring; a second interlayer insulating film formed on said first interlayer insulating film; a common electrode formed on said second interlayer insulating film; a third interlayer insulating film formed on said common electrode; and a pixel electrode formed on said third interlayer insulating film, wherein said pixel electrode is connected with a drain electrode of said thin film transistor via a first aperture formed on said second interlayer insulating film, a second aperture that includes a bottom portion of said first aperture and is formed on said common electrode, a third aperture that includes at least a part of the bottom portion of said first aperture, is included in said second aperture and is formed on said third interlayer insulating film, and a fourth aperture that is formed on said first interlayer insulating film having a shape similar to a region where said third aperture overlaps with the bottom portion of said first aperture.