发明名称 AIR AMOUNT CONTROL DEVICE AND METHOD
摘要 PROBLEM TO BE SOLVED: To enable air amount balance to be maintained even in a case where an air supply valve breaks down.SOLUTION: An air amount control continuation part 113-4 is provided in an air control device 113. The air amount control continuation part 113-4 determines whether a failure occurs in an air supply valve 108 (108A, 108B), and when it is determined that a failure occurs, a general exhaust valve 111 is used as an alternative valve, or an air supply valve 108 in which a failure does not occur is used as the alternative valve, and thus air amount control (air amount balance control) is continued with the air amount control part 113.
申请公布号 JP2015052415(A) 申请公布日期 2015.03.19
申请号 JP20130184791 申请日期 2013.09.06
申请人 AZBIL CORP 发明人 OSAWA NOBUO
分类号 F24F7/007;B01L1/00;F24F7/06 主分类号 F24F7/007
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