| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure for an excimer lamp, by which, even when a plurality of discharge columns generated between electrodes directly collide on internal faces of facing flat wall portions of an arc tube, cracks that could lead to failure in the flat wall portions do not occur, in an excimer lamp having an arc tube of a transverse cross section that is a flattened, generally square shape and comprising a pair of flat wall portions and side wall portions formed integrally with the flat wall portions, a pair of electrodes being disposed on the outside surfaces of the flat wall portions.SOLUTION: The thickness of flat wall portions of an arc tube is greater than the thickness of side wall portions, and 1.2-2.0 times the thickness of side wall portions. |
