CRUCIBLE FOR VAPOR DEPOSITION, VAPOR DEPOSITION APPARATUS AND VAPOR DEPOSITION METHOD

摘要

Provided are a crucible for vapor deposition, a vapor deposition apparatus and a vapor deposition method capable of detecting a film formation rate using a sensor in vapor deposition by proximity vapor deposition. The crucible according to the present invention includes a storage section that stores a vapor deposition source, a first guide passage that guides a vaporized material emitted from the vapor deposition source toward a substrate to be treated, a wall section for defining the first guide passage and a second guide passage that diverges from a middle part of the first guide passage, penetrates the wall section and communicates with the outside.

主权项

1. A crucible for vapor deposition comprising:
a storage section that stores a vapor deposition source; a first guide passage that guides a vaporized material emitted from the vapor deposition source toward a substrate to be treated; a wall section for defining the first guide passage; and a second guide passage that diverges from a middle part of the first guide passage, penetrates the wall section and communicates with the outside.