| 发明名称 |
METAL NITRIDE MATERIAL FOR THERMISTORS, MANUFACTURING METHOD THEREOF, AND THERMISTOR SENSOR |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a reliable metal nitride material for thermistors which is high in resistance, B constant and heat resistance; a method for manufacturing such a metal nitride material; and a thermistor sensor.SOLUTION: A metal nitride material used for thermistors comprises a metal nitride expressed by the general formula, TiAl((NC)O)(where 0.0<w<0.3; 0.0<v<0.35; 0.70≤y/(x+y)≤0.98; 0.45≤z≤0.55; and x+y+z=1), of which the crystalline structure is a hexagonal wurtzite type single phase. A method for manufacturing the metal nitride material for thermistors comprises a film formation step for forming a film by use of a Ti-Al alloy target in an atmosphere containing nitrogen, carbon and oxygen according to an arc-ion-plating technique. |
| 申请公布号 |
JP2015053358(A) |
申请公布日期 |
2015.03.19 |
| 申请号 |
JP20130184787 |
申请日期 |
2013.09.06 |
| 申请人 |
MITSUBISHI MATERIALS CORP |
发明人 |
TANAKA KOICHI;FUJITA TOSHIAKI;TANAKA HIROSHI;NAGATOMO KENSHO;TAKAHASHI MASAKUNI |
| 分类号 |
H01C7/04;C04B35/581;H01C17/06 |
主分类号 |
H01C7/04 |
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