发明名称 SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a semiconductor device manufacturing method which can inhibit a chip from moving by flow of a resin from a position before being buried.SOLUTION: A semiconductor device manufacturing method comprises: a process A of preparing a laminate which has a temporary fixing sheet, a semiconductor chip temporarily fixed on the temporary fixing sheet and a wall part projecting upward from a temporary fixing sheet surface so as to surround a temporary fixing region in which the semiconductor chip is temporarily fixed; a process B of preparing an encapsulation sheet having a shape in planar view, which fits in an encapsulation region surrounded by the wall part; and a process C of burying the semiconductor chip in the encapsulation sheet in the encapsulation region to form an encapsulated body in which the semiconductor chip is buried in the encapsulation sheet.</p>
申请公布号 JP2015053408(A) 申请公布日期 2015.03.19
申请号 JP20130185911 申请日期 2013.09.09
申请人 NITTO DENKO CORP 发明人 MORITA KOSUKE;ISHIZAKA TAKESHI;TOYODA HIDESHI
分类号 H01L21/56 主分类号 H01L21/56
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