| 发明名称 |
PLASMA SPRAY COATING ENHANCEMENT USING PLASMA FLAME HEAT TREATMENT |
| 摘要 |
A method for forming a plasma resistant ceramic coating on an article includes placing the article into a chamber or spray cell of a plasma spraying system. A ceramic powder is then fed into the plasma spraying system at a powder feed rate, and a plasma resistant ceramic coating is deposited onto at least one surface of the article in a plasma spray process by the plasma spray system. The plasma spray system is then used to perform an in-situ plasma flame heat treatment of the plasma resistant ceramic coating to form crust on the plasma resistant ceramic coating. |
| 申请公布号 |
US2015075714(A1) |
申请公布日期 |
2015.03.19 |
| 申请号 |
US201414462271 |
申请日期 |
2014.08.18 |
| 申请人 |
Applied Materials, Inc. |
发明人 |
Sun Jennifer Y.;Chen Yikai;Kanungo Biraja P. |
| 分类号 |
H01J37/32;C23C4/10;C23C4/12 |
主分类号 |
H01J37/32 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method, comprising:
feeding a ceramic powder into a plasma spraying system at a powder feed rate; depositing a plasma resistant ceramic coating on at least one surface of an article in a plasma spray process by the plasma spray system; and performing an in-situ plasma flame heat treatment of the plasma resistant ceramic coating by the plasma spray system to form a crust on the plasma resistant ceramic coating. |
| 地址 |
Santa Clara CA US |
