SEMICONDUCTOR FABRICATION COMPONENT RETUNING

摘要

Among other things, one or more systems and techniques for retuning a semiconductor fabrication component are provided. The semiconductor fabrication component, such as an advanced process control (APC) component, is configured to evaluate or adjust various fabrication parameters associated with semiconductor fabrication processing. Processing data associated with the semiconductor fabrication component is evaluated to formulate performance indices used to evaluate performance of parameters used by the semiconductor fabrication component. One or more fabrication process change simulations are performed to generate a component operating behavior data structure indicating how different values for the parameters result in improved or degraded performance by the semiconductor fabrication component. In this way, the component operating behavior data structure is evaluated to identify tuning values for the parameters that are used to retune the semiconductor fabrication component.

主权项

1. A method for retuning a parameter of a semiconductor fabrication component, comprising:
evaluating processing data associated with a semiconductor fabrication component to formulate performance indices; performing one or more fabrication process change simulations based upon the performance indices to generate a component operating behavior data structure; identifying a first tuning value for a first parameter used by the semiconductor fabrication component based upon the component operating behavior data structure indicating the first tuning value retunes the semiconductor fabrication component with respect to a first current value for the first parameter specified within the processing data; and retuning the first parameter from the first current value to the first tuning value.