| 发明名称 |
SUPPORTING GLASS SUBSTRATE AND CONVEYANCE ELEMENT USING SAME |
| 摘要 |
A supporting glass substrate for supporting a substrate to be processed, the supporting glass substrate not readily causing dimensional variation in the substrate to be processed, the supporting glass substrate characterized by having an average linear thermal expansion coefficient of 50×10－7/˚C to 66×10－7/˚C in a temperature range of 20 to 200°C. |
| 申请公布号 |
WO2015037478(A1) |
申请公布日期 |
2015.03.19 |
| 申请号 |
WO2014JP73085 |
申请日期 |
2014.09.02 |
| 申请人 |
NIPPON ELECTRIC GLASS CO., LTD. |
发明人 |
MIWA SHINKICHI;IKEDA HIKARU |
| 分类号 |
C03C3/091;C03C3/093;H01L21/02;H01L21/304;H01L21/677;H01L21/683 |
主分类号 |
C03C3/091 |
| 代理机构 |
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代理人 |
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