发明名称 METAL PLATE, METAL PLATE MANUFACTURING METHOD, AND METHOD FOR MANUFACTURING MASK USING METAL PLATE
摘要 The purpose of the present invention is to provide a metal plate having good conveyance properties. The maximum steepness value in a central portion in the width direction of a metal plate is 0.4% or less. Further, the maximum steepness value in the central portion is no more than the maximum steepness value in one end side portion, and is no more than the maximum steepness value in the other end side portion. Furthermore, the difference between the maximum steepness value in the one end side portion and the maximum steepness value in the other end side portion is 0.4% or less.
申请公布号 WO2015037709(A1) 申请公布日期 2015.03.19
申请号 WO2014JP74255 申请日期 2014.09.12
申请人 DAI NIPPON PRINTING CO., LTD. 发明人 IKENAGA CHIKAO;MIYATANI ISAO
分类号 C23C14/24;H01L51/50;H05B33/10 主分类号 C23C14/24
代理机构 代理人
主权项
地址