| 摘要 |
<p>Provided are a manufacturing method for a TFT array substrate, a TFT array substrate and a display device. When patterns of a gate layer (2), a gate insulating layer (3) and an active layer are manufactured, a material of the gate layer (2), a material of the gate insulating layer (3) and a material of the active layer are deposited successively, and the gate layer (2), the gate insulating layer (3) and the active layer are manufactured through one patterning process. Therefore, at least one masking process is cut down on, and the complexity of the process flow is reduced.</p> |
