| 摘要 |
<p>#CMT# #/CMT# The phase plate is made of a thin film (8d - 8f) that is partially permeable to electron beams. The thin film is made of an electrically conducting material, and is connected to a predetermined electric voltage (12a - 12c), and has penetration openings (9a - 9c). The thin film is made of amorphous, electrical conductive material, such as gold, aluminum, silver, platinum, titanium and its alloys. #CMT#USE : #/CMT# Phase plate, particularly for an electron microscope, disposed in an electron beam path (Claimed). #CMT#ADVANTAGE : #/CMT# The thin film is made of an electrically conducting material, and is connected to a predetermined electric voltage, and has penetration openings, and thus ensures an increased resolution. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The drawing shows a schematic sectional view of an electron microscope with a phase plate. 7 : Optical axis 8d - 8f : Thin films 9a - 9c : Penetration openings 12a - 12c : Electric voltages 17,18 : Outer walls.</p> |
