发明名称 光電気複合基板の製造方法、及びそれにより得られる光電気複合基板
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an opto-electric composite substrate and a method for manufacturing the substrate having an optical waveguide having excellent flatness of a core pattern layer, reducing a propagation loss of light and having little variation in the propagation loss of light. <P>SOLUTION: The method for manufacturing an opto-electric composite substrate having a first lower clad layer, a wiring pattern embedded in the clad layer, a core pattern and an upper clad layer includes steps of: (A) forming the first lower clad layer on a support and patterning the clad layer; (B) forming the wiring pattern in the patterned opening of the first lower clad layer; (C) forming the core pattern on the first lower clad layer; (D) forming the upper clad layer to cover the core pattern; and (E) removing the support to expose the wiring pattern. The opto-electric composite substrate is obtained by the above method. <P>COPYRIGHT: (C)2012,JPO&INPIT</p>
申请公布号 JP5685925(B2) 申请公布日期 2015.03.18
申请号 JP20100286733 申请日期 2010.12.22
申请人 发明人
分类号 G02B6/13;G02B6/42;H05K1/02 主分类号 G02B6/13
代理机构 代理人
主权项
地址