发明名称 RESISTIVE RANDOM ACCESS MEMORY AND MANUFACTURING METHOD THEREOF
摘要 The present disclosure provides a semiconductor structure which includes a conductive layer and a resistance configurable structure over the conductive layer. The resistance configurable structure includes a first electrode, a resistance configurable layer over the first electrode, and a second electrode over the resistance configurable layer.The first electrode has a first sidewall, a second sidewall, and a bottom surface on the conductive layer. A joint between the first sidewall and the second sidewall includes an electric field enhancement structure. The present disclosure also provides a method for manufacturing the above semiconductor structure, including the steps of: patterning a hard mask on a conductive layer; forming a spacer around the hard mask; removing at least a portion of the hard mask; forming a conforming resistance configurable layer on the spacer; and forming a second conductive layer on the conforming resistance configurable layer.
申请公布号 KR20150029500(A) 申请公布日期 2015.03.18
申请号 KR20130154140 申请日期 2013.12.11
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 LEE PO HAO;CHOU CHUNG CHENG;CHU WEN TING
分类号 H01L27/115 主分类号 H01L27/115
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