发明名称 搬送装置及び真空処理装置
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a conveying device capable of preventing demagnetization by cooling a helical magnet. <P>SOLUTION: A magnetic screw driving mechanism 9 of the conveying device T for rotates a helical magnet shaft 11 having the helical magnet 11a helically magnetized on its surface and pivotally supported in a housing by a driving shaft 13 coupled with a motor. The helical magnet shaft 11 is housed in a case 23 and arranged in a state that it is isolated from an atmosphere in a chamber. By introducing a refrigerant into the case 23, the helical magnet 11a can be effectively cooled. <P>COPYRIGHT: (C)2012,JPO&INPIT</p>
申请公布号 JP5687049(B2) 申请公布日期 2015.03.18
申请号 JP20100289266 申请日期 2010.12.27
申请人 发明人
分类号 B65G54/02;F16H25/24 主分类号 B65G54/02
代理机构 代理人
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