发明名称 有機半導体素子の製造方法および該製造方法によって得られる有機半導体素子
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an organic semiconductor element having excellent stability of electrical characteristics, and to provide an organic semiconductor element. <P>SOLUTION: A method of manufacturing an organic semiconductor element comprises the steps of: forming a gate electrode; forming a gate insulating film; forming source/drain electrodes; forming an organic semiconductor film; and forming a protective film on the organic semiconductor film. In the step of forming the protective film on the organic semiconductor film, the protective film is formed using a protective film forming solution containing (a) at least one organic solvent selected from propylene carbonate, acetonitrile, and dimethylsulfoxide and (b) an organic compound soluble in the organic solvent (a) by wet process. <P>COPYRIGHT: (C)2012,JPO&INPIT</p>
申请公布号 JP5685037(B2) 申请公布日期 2015.03.18
申请号 JP20100219685 申请日期 2010.09.29
申请人 发明人
分类号 H01L21/336;C08K5/3492;C08L83/05;C08L83/07;H01L21/28;H01L21/312;H01L29/786;H01L51/05;H01L51/30 主分类号 H01L21/336
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