发明名称 薄膜トランジスタ及びこれを用いた表示装置、並びに、薄膜トランジスタの製造方法
摘要 <p>A TFT includes a supporting substrate, a gate electrode formed on the supporting substrate, a gate insulation film formed on the substrate so as to cover the gate electrode, a first semiconductor layer formed across from the gate electrode with respect to the gate insulation film, a second semiconductor layer formed on the first semiconductor layer, and having a first thickness and a second thickness which is greater than the first thickness, an ohmic contact layer formed on the second semiconductor layer, and a source electrode and a drain electrode formed on the ohmic contact layer, spacing apart with each other.</p>
申请公布号 JP5687448(B2) 申请公布日期 2015.03.18
申请号 JP20100164366 申请日期 2010.07.21
申请人 发明人
分类号 H01L29/786;H01L21/336;H01L29/417;H01L51/50;H05B33/14 主分类号 H01L29/786
代理机构 代理人
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