| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To set configuration information easily. <P>SOLUTION: An identification information setting device capable of setting identification information easily in a transfer chamber, and an identification information setting method are provided. A storage device 504 stores the field identification information preset for each position where a transfer chamber having a transfer robot can be disposed. The information of the position where a transfer chamber is actually disposed and of the transfer chamber is accepted as the designation information. Correspondence of the transfer chamber disposed actually and the identification information is stored. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
