| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To precisely detect scattered light generated from an object to be measured by irradiating the object to be measured with a plurality of kinds of measurement light having different wavelengths from each other after being switched. <P>SOLUTION: A scattered light detector includes: a support part which supports an object to be measured; a plurality of light sources arranged in different positions from one another which can irradiate the object to be measured supported by a support part with a plurality of measurement light, respectively; a plurality of detectors which detect scattered light generated from the object to be measured irradiated with the measurement light; and a control part which controls the detectors so that the scattered light is detected by only the detectors arranged in a measurement region which is a region not including a light path to the object to be measured of the measurement light and capable of detecting the scattered light, out of the plurality of detectors. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
