发明名称 MASK FRAME ASSEMBLY FOR THIN FILM EVAPORATION
摘要 The present invention relates to a mask frame assembly for a thin film deposition capable of forming a thin film with a uniform thickness. The mask frame assembly for the thin film deposition includes a mask which includes a plurality of mask pattern parts and a plurality of ribs which separate the mask pattern parts, and a frame which has an opening part in the center thereof and supports a mask. The mask pattern part includes a plurality of shielding parts and a plurality of opening parts which are limited by the shielding parts. The shielding parts have inclined surfaces. Each inclined surface of the shielding parts has a different tilt angle.
申请公布号 KR20150029183(A) 申请公布日期 2015.03.18
申请号 KR20130108009 申请日期 2013.09.09
申请人 LG DISPLAY CO., LTD. 发明人 BAE, SUNG IL
分类号 H01L51/56;H05B33/10 主分类号 H01L51/56
代理机构 代理人
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