| 摘要 |
<p>An electromechanical switch comprises a first electrode 11 comprising layers 21 of a first 2D layered material exhibiting a first surface, and a second electrode 12 comprising layers 22 of a second 2D layered material exhibiting a second surface vis-Ã -vis or face to face with the first surface. Each of the 2D materials is electrically conducting and an actuator actuates one of the electrodes to modify a distance between the surfaces, to modify electrical conductivity transverse to the surfaces and enable current modulation between the electrodes. The electrodes may comprise a drain and a source and the actuator a gate electrode (fig 1,13). The surfaces may move parallel to each other, actuation modifying an overlap between them or move transversely with actuation modifying a transverse distance (fig 1, d). An active region comprising one of the surfaces may be surrounded by and level with an inactive region of insulating material (fig 10B, S5) such as hexagonal boron nitride. An actuatable electrode may pivot, flex, rotate and/or slide and comprise an anchored beam. Source and drain electrodes may be side-by-side and parallel to each other and bridged by a third electrode (fig 13, 122) that can rotate (fig 15). The 2D layer may comprise graphene, graphite, BN, MoS2, WS2, MoSe2, NbSe2 NbS2, NbTe2, TaS2, TaTe2 or TiSe2. Actuation may be electrostatic, piezoelectric, magnetic, by thermal deformation, or by material stress. The switch may be micro-electromechanical or nano-electromechanical.</p> |
