| 摘要 |
<p>The present invention provides a mounting, configured for fixing a reactor, in particular a PECVD reactor, in a vacuum chamber (1), the mounting (10) comprising a framework of at least two outer beams (11) being arranged opposite to each other, and a plurality of cross beams (12), wherein the outer beams (11) and the cross beams (12) form compartments (13), in which temperature controlling elements are provided. The mounting (10) according to the invention has a reduced weight and is producible cost saving.</p> |
