| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a glass substrate for a flat panel display capable of suppressing delamination electrification and in which white nonuniformity and clouding do not easily occur. <P>SOLUTION: When a glass substrate is manufactured, a semiconductor element formation surface of the glass substrate on which a semiconductor element is formed and a glass surface on the opposite side are cleaned. An etching process is performed on the cleaned glass surface. The cleaning treatment and the etching process are performed such that Ra (arithmetic mean roughness of the surface roughness measured by an atomic force microscope) of the glass surface on which the etching process has been performed is 0.3 (nm) or more and 1.0 (nm) or less, and Rz-Rzjis (Rzjis is the ten-point mean roughness of surface roughness measured by an atomic force microscope, and Rz is the maximum height of surface roughness measured by an atomic force microscope) is 0.2 (nm) or less. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
