| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a linear encoder capable of reducing a harmonic component superimposed on a fundamental wave component of an output signal from magnetic resistance patterns formed on a substrate surface. <P>SOLUTION: A linear encoder 1 has: a linear magnetic scale 2 on which N poles and S poles are alternately arranged in a magnetic pole pitch P; and a magnetic sensor 3 for detecting the relative movement of the magnetic scale 2. The magnetic sensor 3 has a sensor substrate 4 of which substrate surface 4a is perpendicular to a pole face 2a of the magnetic scale 2 and parallel to a relative movement direction. On the substrate surface 4a of the sensor substrate 4, a plurality of magnetic resistance patterns R1 to R8 for detecting an A-phase and a B-phase are formed at intervals of 1/8 P. Each of the magnetic resistance patterns R1 to R8 includes: a fundamental wave detection magnetic resistance pattern 10; and a harmonic component removal magnetic resistance pattern 20 formed at a position separated from the fundamental wave detection magnetic resistance pattern 10 by a predetermined distance D in the relative movement direction and connected in series to the fundamental wave detection magnetic resistance pattern 10. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
