发明名称 |
METHOD FOR MANUFACTURING A SUPERHYDROPHOBIC FILM SHEET |
摘要 |
<p>The present invention relates to a method for manufacturing a super-hydrophobic film sheet by generating a structure having projections for providing a super-hydrophobic effect such as that of a real lotus leaf by controlling the number of times, and the amount of time, a photoresist is baked and providing a superhydrophobic surface by coating a polymethylsiloxane (PDMS) with a transparent material having hydrophobic qualities. The method comprises the steps of: (a) cleaning a surface of a silicon wafer; (b) coating the top of the silicon wafer with photoresist (AZ4620) using a spin coater, and soft-baking the silicon wafer in an oven; (c) exposing a structure manufactured in step(b) using a mask aligner; (d) developing using a photoresist developing solution (AZ400K); (e) performing PDMS molding on a top of a structure manufactured in step (d); and (f) removing the photoresist (AZ4620) using acetone, thereby completing a superhydrophobic film sheet.</p> |
申请公布号 |
EP2736066(A4) |
申请公布日期 |
2015.03.18 |
申请号 |
EP20120817539 |
申请日期 |
2012.07.19 |
申请人 |
INDUSTRY FOUNDATION OF CHONNAM NATIONAL UNIVERSITY |
发明人 |
LEE, DONG WEON;GO, GUN;PARK, SEUNG HWAN;LEE, SA MYUNG;PARK, JONG SUNG |
分类号 |
H01L21/027;G03F7/00;G03F7/40 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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