| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To automatically determine a type of pallet drawn out from a magazine on which a wafer pallet and a tray pallet are mixedly loaded in a plurality of stages. <P>SOLUTION: A wafer pallet 22 is configured so that a pallet height thereof detected by pallet height detection means becomes a prescribed height. If the pallet height detected by the pallet height detection means differs from the prescribed height, it is determined that: the tray pallet as specified by a production program has been drawn out when the tray pallet is specified by the production program; and an error has occurred when the wafer pallet is specified by the production program. If the pallet height detected by the pallet height detection means equals to the prescribed height, it is determined that the tray pallet as specified by the production program has been drawn out when the tray pallet is specified by the production program and a pallet discrimination part of the tray pallet can be recognized by image recognition by using tray pallet detection means. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
