发明名称 A pattern form object and a manufacturing method thereof
摘要 A pattern form object and its manufacturing method are disclosed. The pattern form object includes a pattern constituted by an aggregate of grains, a supporting member for supporting the pattern, and a mixed layer formed at a boundary of the pattern and the supporting member. The mixed layer is constituted by a mixture of the grains and the supporting member. Dimensions of the grains in a region other than the mixed layer are greater than dimensions of the grains in the mixed layer.
申请公布号 EP1596435(B1) 申请公布日期 2015.03.18
申请号 EP20050252795 申请日期 2005.05.06
申请人 RICOH COMPANY, LTD. 发明人 SANO, TAKESHI;OHKURA, HIDEAKI;KOBAYASHI, HIROFUMI
分类号 G02B5/20;H01L23/498;H01L21/48;H01L21/56;H01L23/13;H01L23/31;H01L23/495;H05K1/00;H05K3/12;H05K3/20 主分类号 G02B5/20
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