METHOD AND DEVICE FOR SENSING ISOTROPIC STRESS AND PROVIDING A COMPENSATION FOR THE PIEZO-HALL EFFECT

摘要

The method involves measuring a Van der Pauw value in a Van der Pauw measurement setup of the hall element (1). A sheet resistance factor is calculated from the Van der Pauw value. The stress value is calculated which depends on the sheet resistance factor. Two Van der Pauw values are measured in the two Van der Pauw measurement setup of the hall element and two diagonal pressures are measured in the two diagonal measurement setup. The latter Van der Pauw value is calculated from the former Van der Pauw value and the difference of the two diagonal pressures. Independent claims are included for the following: (1) a method for determining a component of a magnetic field; (2) a stress sensor for the measurement of isotropic stress; and (3) a Hall sensor for the measurement of a component of a magnetic field.