Method for cleaning a contact pad of a microstructure and corresponding cantilever contact probe and probe testing head

摘要

A method for cleaning a contact pad of a microstructure or device to be tested when it is in electric contact with a measure apparatus, being obtained by electrically contacting a flexible probe with said contact pad. The method includes mechanically engaging a free end of the flexible probe in a manner that sticks the free end in the pad; and laterally flexing, by a tip charge, the flexible probe in a manner that keeps the free end stuck in the pad, so as to locally dig into a covering layer of the pad and realize a localized crushing thereof.

主权项

1. A method for cleaning a contact pad of a microstructure or device to be tested, the device to be tested being in electric contact with a measure apparatus and comprising at least a flexible probe, the flexible probe electrically contacting the contact pad, the method comprising:
mechanically engaging a free end of the flexible probe in a manner that sticks the free end in the pad; and laterally flexing, by a tip charge, the flexible probe in a manner that keeps the free end stuck in the pad, the free end of the flexible probe being pointed and locally digging into a covering layer of the pad and realizing a localized crushing of the covering layer.