| 发明名称 | Charged particle beam apparatus, and article manufacturing method | ||
| 摘要 | A charged particle beam apparatus for processing an object using a charged particle beam includes a charged particle lens in which an array of apertures, through each of which a charged particle beam passes, is formed; a vacuum container which contains the charged particle lens; and a radiation source configured to generate an ionizing radiation; wherein the apparatus is configured to cause the radiation source to pass the ionizing radiation through the array of apertures in a state in which a pressure in the vacuum container is changing. | ||
| 申请公布号 | US8981323(B2) | 申请公布日期 | 2015.03.17 |
| 申请号 | US201313771388 | 申请日期 | 2013.02.20 |
| 申请人 | Canon Kabushiki Kaisha | 发明人 | Tanaka Ichiro;Miyake Akira |
| 分类号 | G21K5/04;H01J37/317;H01J37/02 | 主分类号 | G21K5/04 |
| 代理机构 | Rossi, Kimms & McDowell LLP | 代理人 | Rossi, Kimms & McDowell LLP |
| 主权项 | 1. A charged particle beam apparatus for processing an object using a charged particle beam, the apparatus comprising: a charged particle optical element in which an array of apertures, through each of which a charged particle beam passes, is formed; a vacuum container which contains the charged particle optical element; and a radiation source configured to generate an ionizing radiation, wherein the apparatus is configured to cause the radiation source to pass the ionizing radiation through the array of apertures to irradiate a gas in the vacuum container with the ionizing radiation in a state in which a pressure in the vacuum container is changing. | ||
| 地址 | JP | ||