发明名称 Magnetoresistive effect element and manufacturing method thereof
摘要 According to one embodiment, a magnetoresistive effect element includes a first ferromagnetic layer, a tunnel barrier provided on the first ferromagnetic layer, and a second ferromagnetic layer provided on the tunnel barrier. The tunnel barrier includes a nonmagnetic mixture containing MgO and a metal oxide with a composition which forms, in a solid phase, a single phase with MgO.
申请公布号 US8982614(B2) 申请公布日期 2015.03.17
申请号 US201313962918 申请日期 2013.08.08
申请人 Kabushiki Kaisha Toshiba 发明人 Nagamine Makoto;Ikeno Daisuke;Nishiyama Katsuya;Natori Katsuaki;Yamakawa Koji
分类号 G11C11/00;H01L29/66;H01L21/00;H01L43/12;H01F10/32;H01L43/08 主分类号 G11C11/00
代理机构 Holtz, Holtz, Goodman & Chick PC 代理人 Holtz, Holtz, Goodman & Chick PC
主权项 1. A magnetoresistive effect element comprising: a first ferromagnetic layer; a tunnel barrier provided on the first ferromagnetic layer; and a second ferromagnetic layer provided on the tunnel barrier, wherein the tunnel barrier includes a nonmagnetic mixture containing MgO and a metal oxide with a composition which forms, in a solid phase, a single phase with MgO, and wherein the nonmagnetic mixture is (a) MgTiO having a Ti/(Mg +Ti) concentration of more than 0 and 32 mol % or less, (b) MgMnO having an Mn/(Mg +Mn) concentration of more than 0 and 33 mol % or less, or (c) MgZnO having a Zn/(Mg +Zn) concentration of more than 0 and 44 mol % or less.
地址 Tokyo JP