发明名称 |
Magnetoresistive effect element and manufacturing method thereof |
摘要 |
According to one embodiment, a magnetoresistive effect element includes a first ferromagnetic layer, a tunnel barrier provided on the first ferromagnetic layer, and a second ferromagnetic layer provided on the tunnel barrier. The tunnel barrier includes a nonmagnetic mixture containing MgO and a metal oxide with a composition which forms, in a solid phase, a single phase with MgO. |
申请公布号 |
US8982614(B2) |
申请公布日期 |
2015.03.17 |
申请号 |
US201313962918 |
申请日期 |
2013.08.08 |
申请人 |
Kabushiki Kaisha Toshiba |
发明人 |
Nagamine Makoto;Ikeno Daisuke;Nishiyama Katsuya;Natori Katsuaki;Yamakawa Koji |
分类号 |
G11C11/00;H01L29/66;H01L21/00;H01L43/12;H01F10/32;H01L43/08 |
主分类号 |
G11C11/00 |
代理机构 |
Holtz, Holtz, Goodman & Chick PC |
代理人 |
Holtz, Holtz, Goodman & Chick PC |
主权项 |
1. A magnetoresistive effect element comprising:
a first ferromagnetic layer; a tunnel barrier provided on the first ferromagnetic layer; and a second ferromagnetic layer provided on the tunnel barrier, wherein the tunnel barrier includes a nonmagnetic mixture containing MgO and a metal oxide with a composition which forms, in a solid phase, a single phase with MgO, and wherein the nonmagnetic mixture is (a) MgTiO having a Ti/(Mg +Ti) concentration of more than 0 and 32 mol % or less, (b) MgMnO having an Mn/(Mg +Mn) concentration of more than 0 and 33 mol % or less, or (c) MgZnO having a Zn/(Mg +Zn) concentration of more than 0 and 44 mol % or less. |
地址 |
Tokyo JP |