| 发明名称 | Inner tube for process tube for manufacturing semiconductor wafers | ||
| 摘要 | |||
| 申请公布号 | USD724551(S1) | 申请公布日期 | 2015.03.17 |
| 申请号 | US201229420539F | 申请日期 | 2012.05.10 |
| 申请人 | Tokyo Electron Limited | 发明人 | Kaneko Hirofumi;Endo Atsushi |
| 分类号 | 13-03 | 主分类号 | 13-03 |
| 代理机构 | Burr & Brown, PLLC | 代理人 | Burr & Brown, PLLC |
| 主权项 | The ornamental design for an inner tube for process tube for manufacturing semiconductor wafers, as shown and described. | ||
| 地址 | Minato-Ku JP | ||