Method and structure for a micro-mechanical device containing liquid thereon

摘要

The present invention discloses an adhesive-free method for preparation of micro electro-mechanical structure, comprising forming a micro electro-mechanical structure on a first substrate, forming an enclosing space for immersing liquid on the first or second substrate, and applying pressure to fix the first and second substrate. Before applying the pressure, the assembly including the two substrates is flipped, to make the contact surface immersed by the immersing liquid.

主权项

1. A method for preparation of a micro electro-mechanical structure, comprising the steps of:
forming a micro electro-mechanical structure on a first substrate; forming partition walls on the first substrate, to define an enclosing space containing the micro electro-mechanical structure; introducing a fluid into the enclosing space; covering the enclosing space with a second substrate; flipping the assembly including the first and second substrates, so that contact surface of the partition walls and the second substrate is positioned below a surface of the fluid; and applying a pressure to the first and second substrates to weld the contact surface.