发明名称 |
Polishing pad, production method for same, and production method for glass substrate |
摘要 |
A polishing pad having a polishing layer comprising a thermoset polyurethane foam,
wherein about the thermoset polyurethane foam, the Asker C hardness value thereof is 82 or less as a 60-second value, the hardness value being a value after the foam is immersed in water for 24 hours, and further the value of the tensile storage modulus E′ (30° C.) thereof at a frequency of 1.6 Hz satisfies the following expression (1):
Y<5X−150 (1)
wherein Y represents the tensile storage modulus E′ (MPa), and X represents the Asker C hardness value (60-second value) after the foam is immersed in water for 24 hours. |
申请公布号 |
US8979611(B2) |
申请公布日期 |
2015.03.17 |
申请号 |
US201113696759 |
申请日期 |
2011.03.22 |
申请人 |
Toyo Tire & Rubber Co., Ltd. |
发明人 |
Sato Akinori;Ishizaka Nobuyoshi |
分类号 |
B24D11/00;B24B37/24;B24B7/24 |
主分类号 |
B24D11/00 |
代理机构 |
Morrison & Foerster LLP |
代理人 |
Morrison & Foerster LLP |
主权项 |
1. A polishing pad having a polishing layer comprising a thermoset polyurethane foam,
wherein about the thermoset polyurethane foam, the Asker C hardness value thereof is 82 or less as a 60-second value, the hardness value being a value after the foam is immersed in water for 24 hours, and further the value of the tensile storage modulus E′ (30° C.) thereof at a frequency of 1.6 Hz satisfies the following expression (1):
Y<5X−150 (1)wherein Y represents the tensile storage modulus E′ (MPa), and X represents the Asker C hardness value (60-second value) after the foam is immersed in water for 24 hours. |
地址 |
Osaka JP |