发明名称 Polishing pad, production method for same, and production method for glass substrate
摘要 A polishing pad having a polishing layer comprising a thermoset polyurethane foam, wherein about the thermoset polyurethane foam, the Asker C hardness value thereof is 82 or less as a 60-second value, the hardness value being a value after the foam is immersed in water for 24 hours, and further the value of the tensile storage modulus E′ (30° C.) thereof at a frequency of 1.6 Hz satisfies the following expression (1): Y<5X−150  (1) wherein Y represents the tensile storage modulus E′ (MPa), and X represents the Asker C hardness value (60-second value) after the foam is immersed in water for 24 hours.
申请公布号 US8979611(B2) 申请公布日期 2015.03.17
申请号 US201113696759 申请日期 2011.03.22
申请人 Toyo Tire &amp; Rubber Co., Ltd. 发明人 Sato Akinori;Ishizaka Nobuyoshi
分类号 B24D11/00;B24B37/24;B24B7/24 主分类号 B24D11/00
代理机构 Morrison &amp; Foerster LLP 代理人 Morrison &amp; Foerster LLP
主权项 1. A polishing pad having a polishing layer comprising a thermoset polyurethane foam, wherein about the thermoset polyurethane foam, the Asker C hardness value thereof is 82 or less as a 60-second value, the hardness value being a value after the foam is immersed in water for 24 hours, and further the value of the tensile storage modulus E′ (30° C.) thereof at a frequency of 1.6 Hz satisfies the following expression (1): Y<5X−150  (1)wherein Y represents the tensile storage modulus E′ (MPa), and X represents the Asker C hardness value (60-second value) after the foam is immersed in water for 24 hours.
地址 Osaka JP