Load port apparatus

摘要

To prevent an overload from being imposed on a door drive mechanism when driving a door increased in weight due to upsizing so that reproducibility of a stop position of the door can be ensured, provided is a load port apparatus in which the door drive mechanism for driving the door in a direction perpendicular to an opening-portion forming plane is constituted by: a rotary cylinder capable of pivoting a cam follower from an angle of 0° to an angle of 180°; and a slider including a cam groove capable of housing the cam follower within a plane perpendicular to a rotational axis of the rotary cylinder, the cam groove extending in a vertical direction, and in which the door is supported by the slider.

主权项

1. A load port apparatus, which is to be mounted to an attached surface of a semiconductor processing apparatus to form an opening portion for insertion and removal of an object-to-be-processed, and which opens and closes a lid of a pod as a sealed container arranged on an outside of the semiconductor processing apparatus with respect to the attached surface so that the object-to-be-processed is insertable into and removable from an inside of the pod through the opening portion, the load port apparatus comprising:
a mount table on which the pod is to be placed; a door which is capable of holding the lid of the pod in a state of being placed on the mount table, the door opening and closing the opening portion from an interior side of the semiconductor processing apparatus with respect to the attached surface; and a door drive mechanism which supports the door and causes the door to open and close the opening portion, wherein the door drive mechanism comprises: a slider which is movable along a predetermined trace and supports the door, the slider comprising a cam groove extending in a direction in which the cam groove intersects, at a predetermined intersection angle, a straight line connecting one end portion and another end portion of the predetermined trace, and a drive source of a pneumatic rotary cylinder which supports a cam follower engaging with the cam groove and causes the cam follower to rotate within a predetermined angle range about a rotational center which is a rotational axis arranged at a position spaced apart from the cam follower, and wherein the rotational axis of the drive source faces the slider, the cam groove intersects with the predetermined trace, an operation of the cam follower within the predetermined angle caused by the pneumatic rotary cylinder forms an upwardly convex trace in which the cam follower moves within the cam groove from a lower end of the cam groove to a upper end of the cam groove, and from the upper end of the cam groove to the lower end of the cam groove, and the cam follower positions at the lower end of the cam groove in a vertical direction which is a lower end of the predetermined trace when the cam follower is located at both ends of the predetermined angle range.